Multilevel Operation in Scaled Back-End-of-Line Ferroelectric FETs With a Metal Interlayer
Multi-level operation, conventionally obtained in ferroelectric devices thanks to a domain-dependent inhomogeneous polarization, poses a big challenge for highly-scaled ferroelectric devices, where the number of ferroelectric domains is drastically reduced.In this work, we study a highly scaled back-end-of-line (BEOL) compatible, ferroelectric fiel